Modelling Capacitance voltage graph in MIM structures with low k dielectrics

I am working on copper comb comb structures with SiCOH dielectrics in between, trying to study the mechanisms of time dependent dielectric breakdown. For this I am conducting C-V experiments on probe station to interpret how the curve changes with the stress and breakdown.
So I want to make a COMSOL model for simulating C-V measurements in comb-comb structures.
Any help is appreciated.
Thanks!