Mesh Generation error

In my geometry, am using one very thin PDMS of size 10 nm. All other layers thickness are between 0.1 to 100 um.
I am getting intersecting face element error only for this layer.

If I keep the thickness of PDMS above 100 nm, then mesh is building. But, results are not as desired. As suggested in previous threads, I tried to divide domains and build separate mesh. It is not working.
I also tried with extremely fine element size. But, It is also not working.

Someone please help me.

Thank you in advance.