Hello, I am a new Comsol user and I have a problem with a simulation of a multilayer mems membrane. The simulation results are different form the experimental data. The geometry is a circular 'plate' with four legs fixed at the ends (as shown in an attached file). The membrane is made of 23 layers of PECVD SiO2 and Si3N4.
I am using mems module, solid mechanics interface, linear elastics material model, including geometric nonlinearity (large dimensions: on).
Even when I change the Young's modulus in the material parameters my results are still different from the experimental data (deflection should be much bigger).
I would be very thankful for any hints how to build this model. The comsol file of my model is also attached.
I am using mems module, solid mechanics interface, linear elastics material model, including geometric nonlinearity (large dimensions: on).
Even when I change the Young's modulus in the material parameters my results are still different from the experimental data (deflection should be much bigger).
I would be very thankful for any hints how to build this model. The comsol file of my model is also attached.