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Urgent help in Meshing required...

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Hi,
Im working on building a rf MEMS switch since past months. The big problem i'm facing is in user control meshing. i'm still not clear what to select under ''size of minimal element, Size of maximum element, Resolution of narrow regions''.
I'm finding extremely difficult to mesh structure as the minimum size of my part of the structure is as less as 0.1 micron and maximum as 80 micron.
Regards

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