Hi,
Does anyone know how to simulation contact force in COMSOL 4.3a MEMS module? I am trying to simulate a electrostatic actuated MEMS beam which will make a contact with contact electrode when actuated. Is there any way to calculated the contact force between the beam and contact electrode? I could do a similar simulation in Coventor, but highly doubted the results. Not sure if there is any way to do in COMSOL?
Thanks,
Yuhao
Does anyone know how to simulation contact force in COMSOL 4.3a MEMS module? I am trying to simulate a electrostatic actuated MEMS beam which will make a contact with contact electrode when actuated. Is there any way to calculated the contact force between the beam and contact electrode? I could do a similar simulation in Coventor, but highly doubted the results. Not sure if there is any way to do in COMSOL?
Thanks,
Yuhao