Hi,
I have been modelling several structures of MEMS resonators and when I do the eigenfrequency analysis, I am getting displacements of the order of 1 m while the size of the structures is of the order of 1 um.
Can anyone tell me why I am getting this problem and how it can be solved?
I have been modelling several structures of MEMS resonators and when I do the eigenfrequency analysis, I am getting displacements of the order of 1 m while the size of the structures is of the order of 1 um.
Can anyone tell me why I am getting this problem and how it can be solved?