Dear Sir,
We have been designed 2d Single Axis capacitive comb drive Accelerometer. when i computed electrostatics study to find capacitance i found a large difference between simulation and theoretical values,
below i have attached the same..
and could you please suggest me how i can improve the result..will be looking forward to your reply.
snap shot is also attached.
We have been designed 2d Single Axis capacitive comb drive Accelerometer. when i computed electrostatics study to find capacitance i found a large difference between simulation and theoretical values,
below i have attached the same..
and could you please suggest me how i can improve the result..will be looking forward to your reply.
snap shot is also attached.