Hi Everyone,
I have a circular membrane ( made of Single crystal silicon Si(c) ) of 6mm diameter and 5 um thickness. The Membrane is fixed through the sides with a residual/intrinsic/internal stress of about 1Mpa.
COMSOL either runs out of memory while performing this calculation ( i have a 6gb RAM) or gives a solver error, however it works when the diameter is 3mm.
I have to calculate the Maximum deflection due to the stress, without any external load
Can someone please help me with this and also later i would be fixing the membrane with the help of Beams, is there any function (like array) where i can create one Beam and replicate it?
Thanks in Advance
Sanjay
I have a circular membrane ( made of Single crystal silicon Si(c) ) of 6mm diameter and 5 um thickness. The Membrane is fixed through the sides with a residual/intrinsic/internal stress of about 1Mpa.
COMSOL either runs out of memory while performing this calculation ( i have a 6gb RAM) or gives a solver error, however it works when the diameter is 3mm.
I have to calculate the Maximum deflection due to the stress, without any external load
Can someone please help me with this and also later i would be fixing the membrane with the help of Beams, is there any function (like array) where i can create one Beam and replicate it?
Thanks in Advance
Sanjay