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Error: 7161 The mass matrix is zero - resolve

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Respected sir/ma'am,

I am trying to simulate a Nano ElectroMechanical Switch(NEMS) using the following modules:a)solid, stress-strain, b) Moving Mesh, and c)Electrostatics.
When i run the solver, it shows an error message:'Error: 7161 The mass matrix is zero' along with a warning: 'Not all domains are meshed'.
The sizes are in nano domain. Model is attached for your kind reference.
For meshing i used Mapped Meshing to reduce number of elements.
I am using Version 3.5a on Pentium processor with 32 bit and 2 GB RAM.

Thank You in advance

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