Hi,
I am building a CVD growth model using the heavy species transport, much similar to the silane growth model. My geometry includes a small trench (um scale), where I deposit the material. Is it possible to use the moving mesh system to actually move the edges of the trench according to the growth rate? In this model the setting does not seem to be as straightforward as in electrodeposition models, so if it is possible then how would this be done?
Thanks,
Lauri Lehtola
Aalto University
I am building a CVD growth model using the heavy species transport, much similar to the silane growth model. My geometry includes a small trench (um scale), where I deposit the material. Is it possible to use the moving mesh system to actually move the edges of the trench according to the growth rate? In this model the setting does not seem to be as straightforward as in electrodeposition models, so if it is possible then how would this be done?
Thanks,
Lauri Lehtola
Aalto University